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1. V.E.R.A. -- Virtual Entity of Relevant Acronyms (February 2016)
MEMS
       Micro-ElectroMechanical System
       

2. The Free On-line Dictionary of Computing (30 December 2018)
microelectromechanical system
MEMS

    (MEMS) The integration of mechanical structures
   (moving parts) with microelectronics.  MEMS devices are
   "custom" designed for a purpose which requires a mechanical
   action to be controlled by a computer.

   Applications include sensors, medical devices, process
   controls.

   <http://mems.mcnc.org/>.

   See also nanotechnology.

   (1999-03-25)


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